Pelesko, J.A & Bernstein, D.H <br/><br/>
Modeling MEMS & NEMS 
J.A. Pelesko & D.H. Bernstein 
 - London  Chapman & Hall/CRC  2003 
 - xviii  357 
<br/><br/><label>ISBN: </label>9781584883067 
<br/><br/><label>Dewey Class. No.: </label>14.05+14.01  / PELE